JPH0487649U - - Google Patents
Info
- Publication number
- JPH0487649U JPH0487649U JP12997690U JP12997690U JPH0487649U JP H0487649 U JPH0487649 U JP H0487649U JP 12997690 U JP12997690 U JP 12997690U JP 12997690 U JP12997690 U JP 12997690U JP H0487649 U JPH0487649 U JP H0487649U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- wafer
- quartz glass
- support columns
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 7
- 230000003014 reinforcing effect Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12997690U JPH0487649U (en]) | 1990-11-30 | 1990-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12997690U JPH0487649U (en]) | 1990-11-30 | 1990-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0487649U true JPH0487649U (en]) | 1992-07-30 |
Family
ID=31877348
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12997690U Pending JPH0487649U (en]) | 1990-11-30 | 1990-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0487649U (en]) |
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1990
- 1990-11-30 JP JP12997690U patent/JPH0487649U/ja active Pending